Resonant Micro and Nanoelectromechanical Systems
Physical Measurement Laboratory, Microsystems and Nanotechnology Division
NIST only participates in the February and August reviews.
In recent years, continuing developments in micro and nanoelectromechanical systems (MEMS/NEMS) have fueled a renaissance in the field of miniaturized mechanical sensors and actuators. These devices have attained a great deal of consideration primarily since the practical significance of tailoring site specific properties opens endless possibilities in the construction of a new class of sensors, actuators, and new materials. Our projects focus on fundamental measurements using linear and nonlinear dynamics of suspended structures with emphasis on fluid structure interactions, chemical and biological sensors, collective behavior, optomechanics, materials characterization, and 2D materials.