A new emerging field in engineering is that of micro-nano-robots and micro-nano-devices (http://www.isd.mel.nist.gov/meso_micro/). Potential applications include the manufacture of optical communication devices, CD and DVD drives, flat panel displays, medical devices, scientific instruments, spacecraft components, deformable controlled shape structures, electronics and computer components, and consumer products. Building very small systems requires a better understanding of the underlying science, and investigating and measuring the physical phenomena that contribute or impede the realization of micro-nano-dynamical systems.

Research opportunities exist in the development of metrology tools, sensors, models, calibration techniques, and controllers for meso-micro-nano-robots and meso-micro-nano-devices.